TCAD for reliability

نویسندگان

  • Paul Pfäffli
  • P. Tikhomirov
  • X. Xu
  • I. Avci
  • Y.-S. Oh
  • P. Balasingam
  • S. Krishnamoorthy
  • T. Ma
چکیده

0026-2714/$ see front matter 2012 Elsevier Ltd. A http://dx.doi.org/10.1016/j.microrel.2012.06.025 ⇑ Corresponding author. Tel.: +41 567 1525; fax: +4 E-mail address: [email protected] (P. Pfäffli). Using TCAD tools, many reliability issues can be studied quantitatively. Examples are hot carrier degradation of interfaces, threshold voltage shifts during NBTI stress, radiation effects and soft errors, ESD and latch-up, thermo-mechanical issues, electro-migration and stress-voiding. 2012 Elsevier Ltd. All rights reserved.

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عنوان ژورنال:
  • Microelectronics Reliability

دوره 52  شماره 

صفحات  -

تاریخ انتشار 2012